GlossaryΒΆ

feature extraction
The process of converting images into polygons.
image layer
A set of images that show a device layer.
multiscale images
A set of images that show a device layer at multiple zoom levels. Multiscale images are time consuming to generate, but they are essential for rendering image layers efficiently as the user zooms in and out.
polygon layer
A set of polygons that models a device layer.
SEM
A scanning electron microscope.
stage
A nanometer-precision linear or rotation stage that can be used with a SEM.